L-509 Precision Linear Stage (2024)

Active axes X X X X X X X X X X X X X X X X X X X X X X X X Travel range in X 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm 26 mm 52 mm 102 mm Maximum velocity in X, unloaded 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 50 mm/s 3 mm/s 3 mm/s 3 mm/s 20 mm/s 20 mm/s 20 mm/s 20 mm/s 20 mm/s 20 mm/s Straightness (Linear crosstalk in Y with motion in X) ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm typ. Flatness (Linear crosstalk in Z with motion in X) ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm ± 1 µm ± 2 µm ± 4 µm typ. Pitch (Rotational crosstalk in θY with motion in X) ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad typ. Yaw (Rotational crosstalk in θZ with motion in X) ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad ± 60 µrad ± 90 µrad ± 120 µrad typ. Positioning L-509.023111 L-509.033111 L-509.053111 L-509.023132 L-509.033132 L-509.053132 L-509.025132 L-509.035132 L-509.055132 L-509.10AD10 L-509.20AD10 L-509.40AD10 L-509.14AD00 L-509.24AD00 L-509.44AD00 L-509.10DG10 L-509.20DG10 L-509.40DG10 L-509.10SD00 L-509.20SD00 L-509.40SD00 L-509.1ASD00 L-509.2ASD00 L-509.4ASD00 Tolerance Minimum incremental motion in X 0.1 µm 0.1 µm 0.1 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.8 µm 0.8 µm 0.8 µm 0.2 µm 0.2 µm 0.2 µm 0.1 µm 0.1 µm 0.1 µm 0.1 µm 0.1 µm 0.1 µm 0.02 µm 0.02 µm 0.02 µm typ. Unidirectional repeatability in X ± 0.1 µm ± 0.1 µm ± 0.1 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.2 µm ± 0.1 µm ± 0.1 µm ± 0.1 µm ± 0.4 µm ± 0.4 µm ± 0.4 µm ± 0.3 µm ± 0.3 µm ± 0.3 µm ± 0.1 µm ± 0.1 µm ± 0.1 µm typ. Bidirectional repeatability in X 0.2 µm 0.2 µm 0.2 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.5 µm 0.2 µm 0.2 µm 0.2 µm 3 µm 3 µm 3 µm 1 µm 1 µm 1 µm 0.2 µm 0.2 µm 0.2 µm typ. Reference switch Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Limit switches Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Optical Integrated sensor Incremental linear encoder Incremental linear encoder Incremental linear encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental linear encoder Incremental linear encoder Incremental linear encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Incremental linear encoder Incremental linear encoder Incremental linear encoder Sensor signal Sin/cos, 1V peak-peak Sin/cos, 1V peak-peak Sin/cos, 1V peak-peak A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 A/B quadrature, RS-422 Sin/cos, 1V peak-peak Sin/cos, 1V peak-peak Sin/cos, 1V peak-peak Sensor signal period 20 µm 20 µm 20 µm 20 µm 20 µm 20 µm Drive Properties L-509.023111 L-509.033111 L-509.053111 L-509.023132 L-509.033132 L-509.053132 L-509.025132 L-509.035132 L-509.055132 L-509.10AD10 L-509.20AD10 L-509.40AD10 L-509.14AD00 L-509.24AD00 L-509.44AD00 L-509.10DG10 L-509.20DG10 L-509.40DG10 L-509.10SD00 L-509.20SD00 L-509.40SD00 L-509.1ASD00 L-509.2ASD00 L-509.4ASD00 Tolerance Drive type DC motor DC motor DC motor DC motor DC motor DC motor Brushless DC motor Brushless DC motor Brushless DC motor DC motor with ActiveDrive DC motor with ActiveDrive DC motor with ActiveDrive DC motor with ActiveDrive DC motor with ActiveDrive DC motor with ActiveDrive DC gear motor DC gear motor DC gear motor 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor Nominal voltage 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V 24 V Peak voltage 48 V 48 V 48 V 48 V 48 V 48 V 48 V 48 V 48 V 24 V 24 V 24 V 24 V 24 V 24 V 48 V 48 V 48 V 48 V 48 V 48 V 48 V 48 V 48 V Drive force in positive direction of motion in X 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N typ. Drive force in negative direction of motion in X 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N 60 N typ. Resistance phase-phase 0.81 Ω 0.81 Ω 0.81 Ω 1.63 Ω 1.63 Ω 1.63 Ω 1.63 Ω 1.63 Ω 1.63 Ω 4.09 Ω 4.09 Ω 4.09 Ω 3.3 Ω 3.3 Ω 3.3 Ω 3.3 Ω 3.3 Ω 3.3 Ω typ. Inductance phase-phase 0.64 mH 0.64 mH 0.64 mH 0.27 mH 0.27 mH 0.27 mH 0.27 mH 0.27 mH 0.27 mH 0.18 mH 0.18 mH 0.18 mH 2.8 mH 2.8 mH 2.8 mH 2.8 mH 2.8 mH 2.8 mH Back EMF, phase-phase, rotational 3.3 V/kRPM 3.3 V/kRPM 3.3 V/kRPM 3.95 V/kRPM 3.95 V/kRPM 3.95 V/kRPM 3.95 V/kRPM 3.95 V/kRPM 3.95 V/kRPM 1.68 V/kRPM 1.68 V/kRPM 1.68 V/kRPM max. Number of pole pairs 7 7 7 Maximum power consumption 80 W 80 W 80 W 80 W 80 W 80 W 8,5 W 8,5 W 8,5 W 10 W 10 W 10 W 10 W 10 W 10 W Motor resolution 200 Full steps/rev. 200 Full steps/rev. 200 Full steps/rev. 200 Full steps/rev. 200 Full steps/rev. 200 Full steps/rev. Mechanical Properties L-509.023111 L-509.033111 L-509.053111 L-509.023132 L-509.033132 L-509.053132 L-509.025132 L-509.035132 L-509.055132 L-509.10AD10 L-509.20AD10 L-509.40AD10 L-509.14AD00 L-509.24AD00 L-509.44AD00 L-509.10DG10 L-509.20DG10 L-509.40DG10 L-509.10SD00 L-509.20SD00 L-509.40SD00 L-509.1ASD00 L-509.2ASD00 L-509.4ASD00 Tolerance Permissible push force in Y 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N max. Permissible push force in Z 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N 100 N max. Permissible torque in θx 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m 30 N·m max. Permissible torque in θY 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m 25 N·m max. Permissible torque in θZ 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m 20 N·m max. Moved mass in X, unloaded 240 g 240 g 250 g 220 g 220 g 220 g 220 g 220 g 220 g 220 g 220 g 220 g 240 g 240 g 250 g 220 g 220 g 220 g 220 g 220 g 220 g 240 g 240 g 250 g Drive screw type Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Ball screw Drive screw pitch 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm 1 mm Guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Crossed roller guide Overall mass 1200 g 1300 g 1500 g 1200 g 1300 g 1500 g 1400 g 1500 g 1700 g 1400 g 1500 g 1700 g 1400 g 1600 g 1800 g 1400 g 1600 g 1900 g 1400 g 1500 g 1700 g 1400 g 1600 g 1800 g Material

Aluminum, steel

Holding force in X, passive 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N 50 N Gear ratio i 2401 : 81 2401 : 81 2401 : 81 Miscellaneous L-509.023111 L-509.033111 L-509.053111 L-509.023132 L-509.033132 L-509.053132 L-509.025132 L-509.035132 L-509.055132 L-509.10AD10 L-509.20AD10 L-509.40AD10 L-509.14AD00 L-509.24AD00 L-509.44AD00 L-509.10DG10 L-509.20DG10 L-509.40DG10 L-509.10SD00 L-509.20SD00 L-509.40SD00 L-509.1ASD00 L-509.2ASD00 L-509.4ASD00 Tolerance Operating temperature range 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C 5 to 40 °C Connector HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) D-sub 15-pin (m) D-sub 15-pin (m) D-sub 15-pin (m) D-sub 15-pin (m) D-sub 15-pin (m) D-sub 15-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) HD D-sub 26-pin (m) Sensor connector D-sub 9-pin (m) D-sub 9-pin (m) D-sub 9-pin (m) D-sub 9-pin (m) D-sub 9-pin (m) D-sub 9-pin (m) Recommended controllers / drivers

C-863

C-885 with C-863.20C885

C-884

G-901

G-910

C-863

C-885 with C-863.20C885